JPH0614477Y2 - ダミーウェハ - Google Patents

ダミーウェハ

Info

Publication number
JPH0614477Y2
JPH0614477Y2 JP1988060788U JP6078888U JPH0614477Y2 JP H0614477 Y2 JPH0614477 Y2 JP H0614477Y2 JP 1988060788 U JP1988060788 U JP 1988060788U JP 6078888 U JP6078888 U JP 6078888U JP H0614477 Y2 JPH0614477 Y2 JP H0614477Y2
Authority
JP
Japan
Prior art keywords
dummy wafer
susceptor
shape
wafer
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988060788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01163331U (en]
Inventor
房雄 藤田
美治 茅根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Engineering and Shipbuilding Co Ltd
Original Assignee
Mitsui Engineering and Shipbuilding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Engineering and Shipbuilding Co Ltd filed Critical Mitsui Engineering and Shipbuilding Co Ltd
Priority to JP1988060788U priority Critical patent/JPH0614477Y2/ja
Publication of JPH01163331U publication Critical patent/JPH01163331U/ja
Application granted granted Critical
Publication of JPH0614477Y2 publication Critical patent/JPH0614477Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1988060788U 1988-05-09 1988-05-09 ダミーウェハ Expired - Lifetime JPH0614477Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988060788U JPH0614477Y2 (ja) 1988-05-09 1988-05-09 ダミーウェハ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988060788U JPH0614477Y2 (ja) 1988-05-09 1988-05-09 ダミーウェハ

Publications (2)

Publication Number Publication Date
JPH01163331U JPH01163331U (en]) 1989-11-14
JPH0614477Y2 true JPH0614477Y2 (ja) 1994-04-13

Family

ID=31286485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988060788U Expired - Lifetime JPH0614477Y2 (ja) 1988-05-09 1988-05-09 ダミーウェハ

Country Status (1)

Country Link
JP (1) JPH0614477Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117736A (ja) * 1983-11-30 1985-06-25 Nec Corp ベ−パ−エッチング方法

Also Published As

Publication number Publication date
JPH01163331U (en]) 1989-11-14

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